Automated surface inspection with the AutoScan 3D
measurement system

The AutoScan surface inspection system is an addition to Solarius' industry proven 3D measurement tools based on laser inspection technology. It allows for fully automated measuring sequences through an easy to use Active X environment and was especially designed for use in high volume off-line production and QC environments.

The AutoScan delivers sub-micron resolution in all axes and has flexible system designs depending on individual application needs. Stage configurations start at 300 mm (12"), larger systems comprise stage sizes up to 600 mm (24"). This makes the AutoScan surface inspection tool ideal for highly precise and automated 3D measurement of larger surfaces or groups of parts.

Employing a very powerful analytical software tool (SolarScan), the AutoScan features detailed surface form and finish analysis supported by high-resolution graphics. The user interface is highly configurable, in terms of the data displayed and operator interaction.

The AutoScan comes with the option of two confocal laser point sensors: the LT8010 and the LT8110. Both laser inspection techniques allow macro- and microstructures of soft and touch-sensitive surfaces to be quantified without damaging the sample.

Standard components

• Sensor system
• High precision motorized x, y-stages
• MS Windows^® 2000

Options

• Vacuum fixture and pump
• Custom stage configurations
• Custom fixtures
• Automated z-axis
• Advanced analysis software SolarMap

Applications include

• Thick Film/Hybrid
• IC-Packaging
• Engineering Surfaces

For more information on the AutoScan surface inspection system, please download the data sheet. [pdf, 312 KB]